Method for the measurement of contact angle

摘要

The invention relates to a method for the measurement of the contact angle of wetting liquids on a solid surface, with which a higher measurement accuracy and a better reproducibility of the measurement results is achieved. The method consists in directing a laser beam on the boundary line between the liquid and the level solid surface in such a way that a first part of the laser beam is reflected by the solid surface and a second part is reflected by the liquid surface. The second partial beam is used as measuring beam, in that the angle ( delta ) set up between the measuring beam and the solid surface, which is at a fixed geometrical ratio to the contact angle (r), is determined. The contact angles which can be determined with high accuracy by means of this measuring method give information about the wetting properties of materials, accurate knowledge of which is of great importance, for example for semiconductor production. <IMAGE>