| 摘要 |
<p>Structures on membrane surfaces are usually examined by Auger electron spectroscopy, which gives high resolution. But, with this method, the structure being examined is subjected to high stresses. The invention proposes an Auger spectroscopy apparatus modified so that it is suitable for high-resolution X-ray photo-electron spectroscopy. Not only can high resolution be achieved with this apparatus, but also the material under investigation is subjected to only low stresses. The primary electron beam from an Auger probe impinges on the rear surface of the membrane, thereby inducing X-ray radiation. These X-rays cause photo-electrons to be emitted from the membrane surface. The photo-electrons are used in the analysis of the uppermost layers of atoms in the surface. The sample holder is designed as a Faraday cage so that it can be used to capture the electrons emerging from the rear surface of the membrane. The method is suitable for the examination of very fine structures (micron and sub-micron range).</p> |
