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发明名称
BURNING DEVICE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01321659(A)
申请公布日期
1989.12.27
申请号
JP19880155849
申请日期
1988.06.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
YANO HIDEYOSHI;UEO NORIYUKI;MIYAMOTO TETSUJI;OGATA RYOJI
分类号
H01L23/00
主分类号
H01L23/00
代理机构
代理人
主权项
地址
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