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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH01321674(A)
申请公布日期
1989.12.27
申请号
JP19880154710
申请日期
1988.06.24
申请人
HITACHI LTD
发明人
NAKA HIROSHI;USUDA SHUICHI
分类号
H01L21/308;H01S5/00
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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