| 摘要 |
<p>PURPOSE:To make it possible to transfer a plurality of sheets at the same time, and to improve productivity and reliability by equipping a boat to store a plurality of semiconductor wafers, a boat supporting device, a scooper device, a cassette supporting device, and a deformation detector to detect the deformation of the scooper. CONSTITUTION:In case that a semiconductor wafer W is transferred from a cassette 2 to a boat 1a, a scooper 23 is inserted from the rear side of the cassette 2 into the almost middle position of the semiconductor wafers W accumulated in the cassette 2, and after scooping up the semiconductor wafers W it advances to the specified position of the boat 1a, and puts them in the holding groove of the boat 1a to store, and the scooper 23 retreats. Every time it works for transfer or after it works specified times, the scooper 23 is detected for deformation degree by transmitting light between the light emitting part and the light receiving part of a deformation detector 24 and measuring its leaked light amounts. Hereby, plural sheets can be transferred at the same time, whereby the productivity is improved, and further troubles such as wafer drop, rubbing, etc., at the time of transfer are prevented, whereby the reliability is improved.</p> |
