SUBSTRATE WET PROCESSOR,申请号JP19880148773-传众专利搜索

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发明名称	SUBSTRATE WET PROCESSOR
摘要
申请公布号	JPH01316934(A)	申请公布日期	1989.12.21
申请号	JP19880148773	申请日期	1988.06.15
申请人	NEC CORP	发明人	ITO NAOYA
分类号	H01L21/306;H01L21/304	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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