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经营范围
发明名称
CLEANING DEVICE
摘要
申请公布号
JPH01316935(A)
申请公布日期
1989.12.21
申请号
JP19880148101
申请日期
1988.06.17
申请人
HITACHI LTD
发明人
OKADA TSUNEO;MATSUOKA KAZUHIKO
分类号
B08B3/12;H01L21/304
主分类号
B08B3/12
代理机构
代理人
主权项
地址
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