| 摘要 |
PURPOSE:To readily produce a calcined compact of ZrO2 optimally used for forming thin ZrO2 films according to a vacuum deposition or sputtering method, etc., by forming ZrO2 powder having a specific particle diameter and specified purity at ambient temperature and calcining the resultant compact. CONSTITUTION:ZrO2 powder containing >=30wt.% particles having >=10 to <40mu secondary particle diameter and >=2wt.% particles having <1mu particle diameter and further >=99.0wt.% purity including unavoidably contained HfO2 is formed at ambient temperature and then calcined. Thereby, the objective calcined compact having >4.9g/cm<3> density and the afore-mentioned purity is obtained. This calcined compact is optimally used for forming thin films according to a vacuum deposition or sputtering method, etc., and homogeneous thin ZrO2 films excellent in characteristics as optical films can be obtained with excellent productivity. |
