IN-LINE SPUTTERING DEVICE AND METHOD,申请号JP19880147790-传众专利搜索

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发明名称	IN-LINE SPUTTERING DEVICE AND METHOD
摘要
申请公布号	JPH01316459(A)	申请公布日期	1989.12.21
申请号	JP19880147790	申请日期	1988.06.15
申请人	MURATA MFG CO LTD	发明人	SAKAMOTO YUKIO;FUJINAGA RYUICHI
分类号	C23C14/56;H01L21/203;H01L21/285	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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