| 摘要 |
<p>PURPOSE:To rearrange even two or more wafers which are housed inside a housing jig in a state that they are skipped or unevenly arranged and to transfer them onto a boat by a method wherein one pair of chucks used to hold and transfer the wafers are constituted in such a way that a first chuck part and a second chuck part which are driven so as to be opened and closed independently of each other are contained. CONSTITUTION:A first holding body part 25 and a second holding body part 26 which are driven so as to be opened and closed independently of each other are arranged to be adjacent in the vertical direction; in the first holding part 25, first grooves capable of holding a wafer and second grooves not capable of holding the wafer are formed as vertically holding grooves in a prescribed ratio and at prescribed intervals. In addition, in the second holding body part 26 first holding grooves and second holding grooves, which have been formed so as to be shifted at least by one pitch each with reference to the first holding body part, are formed as vertically holding grooves in a prescribed ratio and at prescribed intervals. By this setup, when two or more wafers are arranged and housed inside a cassette in a state that they are skipped or unevenly arranged, it is possible to transfer the two or more wafers onto a boat at the same intervals as inside the cassette by using both the first holding body part and the second holding body part.</p> |
