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发明名称
MULTILAYER INTERCONNECTION STRUCTURE
摘要
申请公布号
JPH01315164(A)
申请公布日期
1989.12.20
申请号
JP19880147345
申请日期
1988.06.15
申请人
SONY CORP
发明人
YASUSHIGE HIROAKI;SHIIMOTO TSUNENORI
分类号
H01L23/522;H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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