| 摘要 |
PURPOSE:To continuously obtain the information concerning vacuum pressure by providing the means making such a means to automatically to be on in plural times and then to automatically reset that makes the vacuum pressure measuring function to be off when a vacuum pressure measuring function is off. CONSTITUTION:A nude ion guage 20 measuring the vacuum pressure in a vacuum chamber 10 evacuated in a superhigh vacuum, is provided with the means 22, such as a nude ion guage controller, making the vacuum pressure measuring function 20 to be off when the vacuum pressure is abruptly changed. Moreover, by a controlling microcomputer 30, the means 22 which makes the vacuum pressure measuring function to be off when the vacuum pressure function 20 is off is automatically made to be on in plural times and then is automatically reset. As a result, the information concerning vacuum pressure is continuously obtained, and the control of superhigh vacuum treating capacity is allowed to be automated, and an unattended operation is carried out in the superhigh vacuum treatment device. |
