| 摘要 |
PURPOSE: To form a required parallax without moving a sample and to obtain a stereoscopic image by monitoring the position of an objective lens by an eddy current sensor, moving the objective lens to two directions, i.e., an axis vertical to an optical axis and an axis parallel to the optical axis, by a piezoelectric element and vertically scanning a focal face. CONSTITUTION: The position of the objective lens is detected by the eddy current sensor and a mechanical input for moving the objective lens is outputted from the piezoelectric element. Output signals from respective sensor converters are amplified and combined with a position corrected input and composite signals are respectively applied to X-axis and Y-axis differential amplifiers. A manual operation input executed by a front panel of a microscope and a position control signal obtained from a remote automatic input generated by a computer are inputted to respective differential amplifiers. Outputs from the differential amplifiers are applied to a high voltage amplifier for driving the piezoelectric element. Thus, a stereoscopic image is obtained by slightly moving the objective lens in the lateral direction while focusing the lens and forming a required parallax by using the motion of two axes without moving a sample.
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