| 摘要 |
PURPOSE:To improve the precision of a qualitative analysis and avoid analytical troubles caused by electrification by analyzing secondary ions of positive and negative charges spattered from a solid and electrically neutral atoms and molecules (spatter atoms). CONSTITUTION:Three secondary electron multiplier tubes 45, 47, 49 and three electromagnetic shutters 52-54 are provided to concurrently perform three types of mass analyses of secondary ions of positive charges and negative charges and spatter atoms with one mass analyzer. When a sample 3 is struck by a high-speed atom beam 42 emitted from a high-speed atom beam source 41, a secondary beam 43 mixed with secondary ions of positive charges and negative charges and spatter atoms is continuously generated. It is fed to a quadruple electrode type mass analyzer 51 via an energy analyzer 50 and mass- discriminated here and fed to a secondary electron multiplier tube 58 or a secondary electron multiplier tube 59 via the action of potentials of shutters 52-54, mass spectra are outputted from output terminals 66-68. Analyses can be performed without generating troubles such as thermal decomposition. |
