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发明名称
FORMING OF HIGH-RESISTANCE INP LAYER
摘要
申请公布号
JPH01313928(A)
申请公布日期
1989.12.19
申请号
JP19880144646
申请日期
1988.06.14
申请人
FUJITSU LTD
发明人
OKUDA SHINYA
分类号
H01L21/208
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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