发明名称 Method of manufacturing an soi-type semiconductor device
摘要 The present semiconductor device comprises a first semiconductor substrate, an oxide film formed on the substrate and a second semiconductor substrate bonded to the oxide film. In particular, the semiconductor substrate further has a monocrystalline silicon layer which is formed by an epitaxial growth method on the second semiconductor substrate. Circuit elements are formed within the monocrystalline silicon layer.
申请公布号 US4888304(A) 申请公布日期 1989.12.19
申请号 US19860943862 申请日期 1986.12.22
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 NAKAGAWA, KAORU;YAMAMOTO, YOSHIO;MATSUOKA, NOBUTAKA
分类号 H01L21/02;H01L21/20;H01L21/58;H01L21/762;H01L27/12 主分类号 H01L21/02
代理机构 代理人
主权项
地址