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发明名称
INSPECTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01312845(A)
申请公布日期
1989.12.18
申请号
JP19880143170
申请日期
1988.06.10
申请人
NEC YAMAGUCHI LTD
发明人
HONMA MICHIO
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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