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发明名称
APPARATUS FOR TESTING OF SEMICONDUCTOR
摘要
申请公布号
KR890005216(B1)
申请公布日期
1989.12.18
申请号
KR19870005407
申请日期
1987.05.29
申请人
DS KOREA CO.
发明人
TILER, ARTHUR W.
分类号
H01L21/64;(IPC1-7):H01L21/64
主分类号
H01L21/64
代理机构
代理人
主权项
地址
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