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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH01312848(A)
申请公布日期
1989.12.18
申请号
JP19880143365
申请日期
1988.06.10
申请人
SUMITOMO ELECTRIC IND LTD
发明人
MORIKAWA HISASHI
分类号
H01L21/762;H01L21/76;H01L21/761
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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