| 摘要 |
PURPOSE:To enable automatic and precise discrimination of chuck size from the outside by providing an energization pin which is grounded changing the number and position of pins classified by chuck size at the chuck stage side which is connected with the wafer chuck in one-piece structure in opposition to an energization socket provided at a stage holder side. CONSTITUTION:A plurality of energization sockets 20a, 20b are provided to the side of stage holder 9 which are placed side by side at a specified position and connected to an external size-discriminator. Energization pins 24a, 24b are provided to the side of chuck stage 10 in opposition to the energization sockets 20a, 20b changing the number and position of the pins classified by size of the wafer chuck 11. The size of the wafer chuck 11 is automatically discriminated by an external discriminator 23 based on the energization sockets 20a, 20b which are acquired by the mounting condition of the wafer chuck 11 and an energization pattern which is decided by the coupling and combination of the energization sockets 20a, 20b and the pins 24a, 24b. According to this constitution, the size of the wafer chuck 11 can be discriminated automatically and accurately from the outside. |
