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发明名称
ROCK CRYSTAL PRESSURE SENSOR OF THERMAL CONDUCTION TYPE VACUUM GAGE
摘要
申请公布号
JPH01312438(A)
申请公布日期
1989.12.18
申请号
JP19880144128
申请日期
1988.06.10
申请人
SEIKO ELECTRONIC COMPONENTS LTD
发明人
TAMURA FUJIO
分类号
G01L21/10
主分类号
G01L21/10
代理机构
代理人
主权项
地址
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