| 摘要 |
PURPOSE:To make the stable operation possible for a long term having an easy constitution of a device by accelerating ions having the fixed made mass to impact a target and further converting the generated electron rays into X-rays for being detected. CONSTITUTION:An ion spectrometer 2 is provided inside a vacuum chamber 1 and the fixed mass of ions are taken out from a slit of an accelerating electrode for making them incident on a target 5 between the deflection plates 4. At this time, AC voltage is impressed on the deflection plates 4 to swing an ion flow I for making the partial ion flow to be incident on the target 5 while making the other ion flow to be absorbed by a charged particle absorbing electrode 6 so as to enable an amount of generated electron rays E to be freely adjusted. The electron rays E areaccelerated by an accelerating electrode to be incident on an X-ray generating target and the generated X-rays pass through a strength adjusting filter 10 for being detected by an X-ray detector 11. Thereby, one ion can generate one detection output pulse so that the accurate and correct observation can be performed easily and for a long term.
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