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发明名称
METAL ORGANIC VAPOR PHASE EPITAXIAL GROWTH SYSTEM
摘要
申请公布号
JPH01310533(A)
申请公布日期
1989.12.14
申请号
JP19880142193
申请日期
1988.06.09
申请人
FUJITSU LTD
发明人
YAMAZAKI SUSUMU
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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