ELECTRON BEAM APPARATUS COMPRISING AN INTEGRATED ANODE/BEAM BLANKING UNIT

摘要

A beam blanking device 4 in an electron beam apparatus is mechanically integral with an anode 3 of the apparatus. As a result, these components can be exactly positioned with respect to one another and a readily exchangeable unity is obtained. Preferably the anode/beam blanking unit with the electron gun 30 are combined in order to obtain a mechanical unity which can be mounted in the electron beam apparatus so as to be readily removable as one unit. For apparatus operating with a high potential of at the utmost about 1 KeV with decreased dimensions of the construction an extremely exact positioning and high frequency control can be realised.