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发明名称
CR-CU TARGET MATERIAL AND ITS PRODUCTION
摘要
申请公布号
JPH01309961(A)
申请公布日期
1989.12.14
申请号
JP19880140331
申请日期
1988.06.07
申请人
HITACHI METALS LTD
发明人
TANIGUCHI SHIGERU;OGATA KENJI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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