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发明名称
VERFAHREN ZUR NASSCHEMISCHEN OBERFLAECHENBEHANDLUNG VON HALBLEITERSCHEIBEN
摘要
申请公布号
DE3818714(A1)
申请公布日期
1989.12.14
申请号
DE19883818714
申请日期
1988.06.01
申请人
WACKER-CHEMITRONIC GESELLSCHAFT FUER ELEKTRONIK-GRUNDSTOFFE MBH, 8263 BURGHAUSEN, DE
发明人
LAMPERT, INGOLF, 8263 BURGHAUSEN, DE;GRATZL, CHRISTA, 8265 NEUOETTING, DE
分类号
B08B3/08;H01L21/304;H01L21/306
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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