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发明名称
FUNCTIONAL DEPOSIT FILM-FORMING DEVICE BY SPUTTERING METHOD
摘要
申请公布号
JPH01309959(A)
申请公布日期
1989.12.14
申请号
JP19880138333
申请日期
1988.06.07
申请人
CANON INC
发明人
OKAMURA NOBUYUKI;YAMAGAMI ATSUSHI;TAKABAYASHI MEIJI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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