| 摘要 |
PURPOSE:To accurately analyze the surface state of a metallic material and to enhance the analytical accuracy in the succeeding process by providing a surface gas removing treatment chamber and an analyser for analyzing the surface state of the metallic material by Auger electron spectrum analysis. CONSTITUTION:After surface gas removing treatment is applied to the surface of a metallic in a surface gas removing treatment chamber 1, the surface state of the metallic material is analyzed by an analyser 8 for analyzing the surface state of the metal material by Auger electron spectrum analysis. By this method, the surface state of the metal material can be accurately analyzed. Therefore, the analytical accuracy of gas in the succeeding process can be enhanced. |
