| 摘要 |
PURPOSE:To improve the deformation accuracy of a chuck and to make an apparatus compact by connecting a plurality of substrate-chuck deforming means which are arranged in two horizontal directions to transmitting means which drive a plurality of displacing means for every line through a plurality of switching means. CONSTITUTION:A plurality of screws 71a1-71e1, a2-e2,... which constitute means for displacing a chuck 3 are arranged in two horizontal directions at right angles one another at the lower parts of sensors 70 which measure the heights of the surface of the chuck 3. The screws 71a1, a2,...b1, b2... are connected to transmitting shafts 75a1, a2,...b1, b2... through switching means 76a1, 76a2... and further connected to motors 73a-73e through transmitting means 74a1, 74a2.... When the motor 73a-73e are driven and the switching means 76a1, 76a2... are turned ON and OFF, the screws 71a1, 71a2... are controlled at arbitrary heights. Therefore, the substrate which is held with the chuck 3 can be deformed into an arbitrary shape. |
