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发明名称
VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG EINES WEITERVERARBEITUNGSGERECHTEN, SORTIERTEN HALBLEITERCHIPVERBANDES
摘要
申请公布号
DD274304(A1)
申请公布日期
1989.12.13
申请号
DD19880318069
申请日期
1988.07.19
申请人
VEB ELEKTROMAT DRESDEN,DD
发明人
MATTHIAS,MANFRED,DD;THIEL,FRITZ,DD;ROHNE,KLAUS,DD;PAUL,WOLFGANG,DD;PERTHEN,HOLGER,DD;JAEHNICHEN,HARALD,DD
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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