发明名称 DETECTION OF POSITION OF MOVING BODY INSIDE VACUUM TANK
摘要 <p>PURPOSE:To detect an accurate position of a moving body by a method wherein electrodes used to close a switch by means of the moving body when the moving body is placed on a moving-body cradle are installed at the moving-body cradle. CONSTITUTION:Electrodes 9-1, 9-2 are installed on a moving-body cradle 7 so as to constitute a switch. Since the surface of a moving body 8 is manufactured by using a conductor, the moving body 8 short-circuits the electrodes 9-1, 9-2 when the moving body 8 is placed on the cradle 7, and the switch is closed. It is detected by means of a meter 11 that an electric current from a power supply 10 has flowed. When it is confirmed that the electric current from the power supply 10 has started to flow, it is known that the moving body 8 has been placed on the cradle 7 in this position. It is recognized that the moving body 8 has been detected from the cradle 7 in a position where the cradle 7 has been shifted and the electric current has stopped flowing. By this setup, an accurate position of the moving body 8 can be detected.</p>
申请公布号 JPH01309349(A) 申请公布日期 1989.12.13
申请号 JP19880140238 申请日期 1988.06.07
申请人 FUJITSU LTD 发明人 SOEJIMA YUKIO
分类号 G01B7/00;H01L21/68 主分类号 G01B7/00
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