Thin film circuit vacuum processing facility,申请号US19640405964-传众专利搜索

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发明名称	Thin film circuit vacuum processing facility
摘要
申请公布号	US3314395(A)	申请公布日期	1967.04.18
申请号	US19640405964	申请日期	1964.10.23
申请人	MELPAR, INC.	发明人	HEMMER FERDINAND J.
分类号	C23C14/04;C23C14/22	主分类号	C23C14/04
代理机构		代理人
主权项
地址

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