| 摘要 |
PURPOSE:To improve high-frequency characteristics and soft magnetic characteristics, and to enhance saturated magnetostriction by alternately depositing and laminating Fe films and permalloy films and thermally treating the deposit-film under specified conditions. CONSTITUTION:A magnetic substance film is formed by alternately depositing and laminating Fe films 11 and permalloy (NiFe) films 12 onto an amorphous substrate 10. The Fe films 11 are set within a range of 0.01-0.2mum and the permalloy film 12 within a range of 1.0-10.0nm in film thickness at that time. The laminated film is thermally treated under set conditions as fixed temperature and time in a vacuum or the atmosphere of an inert gas and a reducing atmosphere. Accordingly, high-frequency characteristics are improved, soft magnetic characteristics are enhanced and internal stress generated by laminating is removed. Consequently, saturated magnetostriction is elevated. |
