| 摘要 |
PURPOSE:To obtain Y-Ba-Cu-based composite oxide superconducting thin film free from pores, etc., through the ultrasonic atomization technique, by contact of atomized fine particles of respective solutions of Y, Ba and Cu compounds and a heated substrate in the presence of a beta-diketone. CONSTITUTION:Atomized fine particles of respective solutions of Y, Ba and Cu compounds are brought into contact with a heat-resistant substrate heated in advance, in the presence of atomized fine particles of a beta-diketone followed, by if needed, afterheat-treatment, thus forming the objective thin film on the substrate. According the above process, the objective superconducting ceramic thin film consisting of Y-Ba-Cu-based composite oxide, free from pores, pinholes, cracks, etc. with electrical high reliability can be obtained. The presence of said beta-diketone is assumed to enhance the bonding forces among the respective Y, Ba and Cu compounds and film formability. Said diketone may be one linked to any of said compounds or used as a solvent for said compounds. |
