发明名称 Microelectronic Field Ionizer and Method of Fabricating the Same.
摘要 <p>A microelectronic field ionizer and alternate fabrication procedures for the same are described. The field ionizer has an array of small diameter gas outlets in the form of microvolcanos. A counterelectrode layer of material is provided on the microelectronic substrate, in registration with the gas outlets.</p>
申请公布号 EP0346271(A1) 申请公布日期 1989.12.13
申请号 EP19890730139 申请日期 1989.06.07
申请人 SRI INTERNATIONAL 发明人 SPINDT, CHARLES A.
分类号 H01J9/02;H01J27/26 主分类号 H01J9/02
代理机构 代理人
主权项
地址