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发明名称
MICROWAVE PLASMA GENERATOR
摘要
申请公布号
JPH01309300(A)
申请公布日期
1989.12.13
申请号
JP19890038219
申请日期
1989.02.20
申请人
HITACHI LTD
发明人
OKAMOTO YUKIO
分类号
H05H1/46;H01L21/203;H01L21/302;H01L21/3065;H01L21/31
主分类号
H05H1/46
代理机构
代理人
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地址
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