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发明名称
SECONDARY ELECTRON DETECTOR FOR USE IN A GASEOUS ATMOSPHERE.
摘要
申请公布号
EP0314763(A4)
申请公布日期
1989.12.13
申请号
EP19880904896
申请日期
1988.05.17
申请人
ELECTRO-SCAN CORPORATION
发明人
MANCUSO, JAMES, F.;MAXWELL, WILLIAM, B.;DANILATOS, GERASIMOS, D.
分类号
H01J37/28;H01J37/06;H01J37/244;H01J37/252
主分类号
H01J37/28
代理机构
代理人
主权项
地址
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