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发明名称
PREPARATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01304726(A)
申请公布日期
1989.12.08
申请号
JP19880136157
申请日期
1988.06.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
YONEDA MASAHIRO
分类号
H01L21/768;H01L21/28;H01L21/285
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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