SEMICONDUCTOR WAFER WASHER,申请号JP19880136185-传众专利搜索

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发明名称	SEMICONDUCTOR WAFER WASHER
摘要
申请公布号	JPH01304733(A)	申请公布日期	1989.12.08
申请号	JP19880136185	申请日期	1988.06.01
申请人	MITSUBISHI ELECTRIC CORP	发明人	TSUMORI KIYOKO
分类号	B08B3/04;H01L21/304	主分类号	B08B3/04
代理机构		代理人
主权项
地址

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