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发明名称
COUNTER-FLOW PREVENTING METHOD FOR SUBLIMATED GAS
摘要
申请公布号
JPH01303382(A)
申请公布日期
1989.12.07
申请号
JP19880054997
申请日期
1988.03.10
申请人
EBARA CORP
发明人
NIIMURA YOSHIHIRO;KIKUTA RITSUO;UEISHI OSAMU;MISHIMA SHIGERU
分类号
F16K15/04
主分类号
F16K15/04
代理机构
代理人
主权项
地址
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