| 摘要 |
PURPOSE:To prevent movement of a weight by acceleration from being obstructed by dust by setting the shortest interval between the weight and a semiconductor substrate except the weight and a cantilever to >=50mum. CONSTITUTION:If this semiconductor is assembled, with dust adhering to the inside of the case, the clearance 16 between a weight 12 and supporting rim 14 may get clogged with the dust by vibrations, etc., and the movement of the weight 12 by acceleration may be obstructed, resulting in incapability of acceleration detection. Therefore, the width of the clearance 16 is set to >=50mum so that the dust staying inside the case at the time of assemblage can smoothly pass through the clearance and cannot obstruct the movement of the weight 12, because most of such dust is <=50mum in diameter. |
