| 摘要 |
PURPOSE:To remove mutual interference between respective branch pipe systems and to attain stable control by executing the whole flow rate control to control total flow rate and the control of flow rate distribution to two processing device systems under the conditions satisfying a prescribed relational formula. CONSTITUTION:Processing devices 27A, 27B calculate fluid feeding volumes Q**a, Q**b required for these deviceses respectively and then select feeding flow rate set values Q*a, Q*b previously fixed in accordance with the calculated values to input the selected values to a concentrated controlling means 25. Respective branch pipes 6A, 6B detect actual feeding flow rate detecting values Qa, Qb to input them to the means 25. The whole flow rate control is performed by a fluid machine flow rate controlling means 26 on the basis of the sum of the values Q*a, A*b and the flow rate distribution control is performed by the means 26 and a feeding flow rate controlling means 28. In this case, the condition shown by the formula should be satisfied. Where, (i) and (j) show two systems out of two processing device systems and a fluid machine system and DELTAR and Q are the resistance correcting value of a piping system in one device system and the tare of one system respectively. |
