| 摘要 |
PURPOSE:To discriminate easily a defect inspection to measured data on account of a simplification of attaching operation, promoted automation and constant holding force of an electronic parts by attaching the electronic parts to a transducer by suction. CONSTITUTION:The electronic parts 9 are mounted on upper surface of a chuck 5 so that a sucking hole 6 is closed by the one surface of said parts. If suction pump sucks the hole 6 through a hose 8, a suction path 7, the parts 9 is sucked to the hole 6. If an exciter 1 along with the transducer 3 vibrate the parts 9 which are sucked thereto and are united to one body, sound is generated due to this vibration in case when foreign matters are mixed in a package. This acoustic pulse is propagated to the transducer 3 through the chuck 5 and is converted to an electrical signal. This signal is impressed to a control unit 4, a signal processing is performed and the existence of the internal defect can be discriminated. |
