| 摘要 |
PURPOSE:To control the position of respective components by integrating monolithicly a semiconductor laser, a detector, a hologram element and a lens on the same chip. CONSTITUTION:Etching is executed to a wafer, three parts of a laser part 9, a detector part 9 and a reflecting part 11 are formed, both active layers (A) and (B) remain at a detector part 10 and an active layer (A) of a lower part only remains by the laser part 9. The side surface of the laser part 9 and the detector part 10 becomes vertical, the reflecting part 11 has the inclina tion of 45 deg. and as such, the etching is executed. At the side surface of the reflecting part, a lattice-shaped metallic film is thickly formed, a reflecting type hologram optical element 13 is obtained, SiO212 is thickly formed only the wafer, a Fresnel collimator lens 14 is formed on the surface and a monolith ic hologram optical pickup is obtained. Thus, with the technology of the lithogra phy, the position of respective optical parts can be controlled with a sufficient high accuracy. |
