GRID CONVERTER FOR SUBSTRATE INSPECTING DEVICE,申请号JP19880134613-传众专利搜索

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发明名称	GRID CONVERTER FOR SUBSTRATE INSPECTING DEVICE
摘要
申请公布号	JPH01304372(A)	申请公布日期	1989.12.07
申请号	JP19880134613	申请日期	1988.06.01
申请人	HITACHI ELECTRON ENG CO LTD	发明人	YAMAHA TSUNEO
分类号	G01R31/28;H01L21/66	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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