| 摘要 |
An X-Y table generally comprises a stationary bed and a table body disposed on the bed to be movable along guide member in X- and Y-axis directions in rectangular coordinates. The table body is driven by a linear motor to be disposed between the table body and the stationary bed, and the linear motor comprises a fixed member as a stator disposed on the upper surface of the stationary bed or the lower surface of the table body, first and second movable members disposed in operative association with the fixed member on the other surface, and a magnetic device for moving the first and second movable members. The fixed member is provided with fixed teeth formed in a lattice shape, with equal pitches in X- and Y-axis directions. |
