| 摘要 |
PURPOSE:To improve the movement characteristic of a stage, by making a moving stage section vibrate with respect to a driving section and a sliding section to ease the effect of an elastic deformation, unbalanced state, hysteresis and the like as caused with a fine movement. CONSTITUTION:The rotation of a drive motor 2 is transmitted to a feed screw 3 to apply a linearly driving force to a stage 7 through a nut 4 so that the stage 7 moves along a guide 8. One end of a holder 5 of the nut 4 is connected to a vibrating element 6 such as a piezo-electric element while the other end of the element 6 is connected to the stage 7. The vibration by the element 6 causes the stage 7 to vibrate with respect to the holder 5 while causing the nut 4 to vibrate with respect to the feed screw 3. The screw 3 also vibrates in a direction of a thrust to a bearing 9 and moreover, a motor 2 is caused to vibrate in fine rotation. This eases the effect of an elastic deformation, unbalanced state, hysteresis and the like thereby improving the movement characteristic of the stage 7. |
