| 摘要 |
PURPOSE:To uniformize preparatory ionization density, and reduce the jitter of discharge pulse by a method wherein, prior to main discharge between main electrodes, preparatory ionization electrodes for preparatory ionization between the main electrodes are subjected to preparatory ionization by using auxiliary preparatory ionization electrodes. CONSTITUTION:A voltage applied to main electrodes 13, 14 by closing a high voltage switch 19 is equal to a voltage generating between both ends of a charging coil 18. When this voltage exceeds the firing potential of a pin electrode 23, auxiliary preparatory ionization discharge generates. By generation of the auxiliary preparatory ionization discharge, the pin electrode 21 is subjected to preparatory ionization, preparatory ionization discharge generates, and spark discharge generates. By ultraviolet rays generated by the spark discharge, the main electrodes 13, 14 are subjected to preparatory ionization. Between the main electrodes 13, 14, uniform glow discharge generates, and laser light generates. |
