| 摘要 |
PURPOSE:To realize a stable laser output and to execute an oscillation for many hours by maintaining an optimum concentration distribution of a copper vapor by installing a dam used to prevent a molten metal medium from flowing to the central side of a container. CONSTITUTION:One pair of electrodes 1, 2 are arranged so as to be faced inside a cylindrical container where an inert gas has been sealed; a metal medium 6 placed inside said container is vaporized by means of discharge energy between both electrodes 1, 2; a prescribed pulse voltage is applied to a mixed gas composed of said inert gas and a metal vapor; a laser beam is generated. In such an apparatus, a dam 16 used to prevent the molten metal medium 6 from flowing to the central side of the container is installed. For example, a dam 16 formed by using a silica-alumina-based heat-resistant inorganic adhesive is installed at both ends of an inside tube 6 as shown in the figure. By this setup, a liquid drop of a metal for metal vapor generation use is not shifted to the central part of the inside tube due to bending of the central part of the inside tube; accordingly, it is possible to obtain a stable laser for many hours. |
