| 摘要 |
PURPOSE:To shield disturbing light accurately without causing a trouble in the transport of an object to be inspected, by moving a shielding plate to a disturbing light shielding position when an object to be inspected reaches an inspecting position to shift the shielding plate outside a moving locus of the object to be inspected after the end of picking up. CONSTITUTION:When a semiconductor device 1a reaches an inspecting position, a shielding plate 17 positioned at a rising position is lowered. Light from a light source other than a lighting device 19 is shielded. The semiconductor device 1a is irradiated with a light G photographable from the lighting device 19 synchronizing the shielding action and a bending of a lead is inspected by taking the semiconductor device 1a with a camera 12a. After a fixed time necessary for inspection of appearance passes, an output of the camera is cut off. The shielding plate 17 is lifted by an output of a control circuit synchronizing a timing of ending the photography and then, retracted outside a moving locus of the semiconductor device 1a. |
